Three-Dimensional Structuring of Resists and Resins by Direct Laser Writing and Holographic Recording

Optical techniques for three-dimensional micro- and nanostructuring of transparent and photo-sensitivematerials are reviewed with emphasis on methods of manipulation of the optical field, such as beam focusing,the use of ultrashort pulses, and plasmonic and near-field effects. The linear and nonlinear optical responseof materials to classical optical fields as well as exploitation of the advantages of quantum lithographyare discussed.

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