论文信息 - The design and fabrication of an optical fiber MEMS pressure sensor

The design and fabrication of an optical fiber MEMS pressure sensor

A novel pressure sensor based on Fabry-Perot interferometry and micro-electromechanical system (MEMS) technology is proposed and demonstrated. Basic micro-electromechanical technique has been used to fabricate the pressure sensor. Fabrication process and packaging configuration are proposed. The loaded pressure is gauged by measuring the spectrum shift of the reflected optical signal. The experimental results show that high linear response in the range of 0.2-1.0 Mpa and a reasonable sensitivity of 10.07 nm/MPa (spectrum shift/pressure) have been obtained for this sensor.

Ming Wang | Yixian Ge | Xuxing Chen | Hua Rong

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