Relation Between Light Scattering and Morphology of Columnar Structured Optical Thin Films

Abstract A statistical model is presented describing the surface roughness of columnar structured thin films. Based on this model, a formula has been derived relating total integrated light scattering to the evolutionary exponent that represents a quantitative characterization of the evolution of the columns with film thickness. The examination of evaporated PbF2 films offers the opportunity to test the suitability of the theoretical considerations by comparing results calculated from scattering data with transmission electron microscopy observations.

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