Evolution of phase composition and associated properties in the process of growth of thin films

A complete set of equations describing the evolution of phase composition of an island ensemble at the stage of the Ostwald ripening in the process of thin-film growth is derived and its solution is found. The size distribution function of islands in solid solutions is obtained for different types of growth mechanisms. The general approach to control phase composition and associated properties (electric, optical, mechanical, and others) in formed multicomponent systems is elaborated. It is shown that the most favorable conditions to control these properties occur at the Ostwald ripening stage and also during nonlinear phenomena, such as self-excited oscillations or self-organization. The relationship between size and composition of the new phase nuclei formed in the course of condensation of solid solution films is revealed. A set of equations describing the evolution of the size distribution function of the properties in island films of solid solutions during changes in external parameters of the system ...

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