Application of micro-ball bearing on Si for high rolling life-cycle

Abstract In this paper, we introduce a new class of micro-ball bearing that can be applied between two Si surfaces in relative motion where wear is a problem. Wide channel was created on one Si plate for all the ball bearings to roll within this channel rather than in individual grooves. This type of micro-bearings can be applied as friction reducers to micro- and nano-machines. The tribometer set-up consisted of a top plate (Si wafer), which was connected to a conventional bearing, resting on a bottom plate (also Si wafer) that was rotated at 300 and 500 RPM by a DC motor. Borosilicate glass micro-spheres, 53±3.7 μm in diameter, were rotated between the two circular silicon plates (15 mm diameter) under a dead weight of 235 μN and in high-humidity conditions (75% relative humidity (RH)). Tests on the plate with wide channel consistently exceeded 1 million cycles of rotation without failure of the bearing. The main factors affecting the life-cycle are identified as the presence of a wide channel, ball dispersion, and alignment of the Si plates.

[1]  S. Sinha,et al.  Tribology of a novel UHMWPE/PFPE dual-film coated onto Si surface , 2006 .

[2]  Bartosz A Grzybowski,et al.  Dynamic self-assembly of rings of charged metallic spheres. , 2003, Physical review letters.

[3]  O. Braun.  Simple model of microscopic rolling friction. , 2005, Physical Review Letters.

[4]  R. Maboudian,et al.  Tribological Challenges in Micromechanical Systems , 2013 .

[5]  T. Rouxel,et al.  Viscoelastic behavior of a soda-lime-silica glass in the 293–833 K range by micro-indentation , 2006 .

[6]  Jeremy A. Walraven,et al.  Failure mechanisms in mems , 2003, International Test Conference, 2003. Proceedings. ITC 2003..

[7]  R. Reuben,et al.  Frictional study of micromotor bearings , 1997 .

[8]  H. Spikes,et al.  Mechanism of Action of Colloidal Solid Dispersions , 2003 .

[9]  Brij M Moudgil,et al.  Capillary forces between surfaces with nanoscale roughness. , 2002, Advances in colloid and interface science.

[10]  Rolling friction in a linear microactuator , 1993 .

[11]  F. F. Ling,et al.  Tribological Study of Microbearings for MEMS Applications , 2005 .

[12]  Sidney R. Cohen,et al.  Hollow nanoparticles of WS2 as potential solid-state lubricants , 1997, Nature.

[13]  A. Gellman.  Vapor Lubricant Transport in MEMS Devices , 2004 .

[14]  N. Sasaki,et al.  C60 molecular bearings. , 2003, Physical review letters.

[15]  R. Superfine,et al.  Nanometre-scale rolling and sliding of carbon nanotubes , 1999, Nature.

[16]  Benjamin Shapiro,et al.  Characterization of dynamic friction in MEMS-based microball bearings , 2004, IEEE Transactions on Instrumentation and Measurement.

[17]  John A. Williams,et al.  Friction and wear of rotating pivots in MEMS and other small scale devices , 2001 .

[18]  S. M. Hsu,et al.  Adhesion and Friction Studies of Silicon and Hydrophobic and Low Friction Films and Investigation of Scale Effects , 2004 .

[19]  J. Baras,et al.  Vision-Based Microtribological Characterization of Linear Microball Bearings , 2004 .

[20]  Lev Rapoport,et al.  Mechanism of friction of fullerenes , 2002 .

[21]  Ho Jung Hwang,et al.  Fullerene nano ball bearings: an atomistic study , 2004 .

[22]  G. Skidmore,et al.  Wet-etch release process for silicon-micromachined structures using polystyrene microspheres for improved yield , 2005, Journal of Microelectromechanical Systems.

[23]  R. Maboudian.  Surface processes in MEMS technology , 1998 .

[24]  T. Rouxel,et al.  Creep Behavior of Soda‐Lime Glass in the 100–500 K Temperature Range by Indentation Creep Test , 2005 .

[25]  Jeremy A. Walraven,et al.  MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes , 2000 .

[26]  J. Israelachvili,et al.  Direct measurement of the effect of meniscus forces on adhesion: A study of the applicability of macroscopic thermodynamics to microscopic liquid interfaces , 1981 .

[27]  Steven T. Patton,et al.  Failure mechanisms of a MEMS actuator in very high vacuum , 2002 .