Charge-injection phase change memory with high-quality GeTe/Sb2Te3 superlattice featuring 70-μA RESET, 10-ns SET and 100M endurance cycles operations

We developed a high quality charge-injection GeTe/Sb2Te3 superlattice phase change memory. A RESET-current of 70 μA and a SET-speed of 10 ns, the fastest ever reported, were obtained. Transmission electron microscopy analysis showed that the superlattice structure was maintained after 1 million (M) endurance. Even 100 M cycle endurance was possible, and these results conclusively proved non-melting resistive switching.