论文信息 - Micro-Anode Guided Electroplating (MAGE) Control System with Digital Imaging Enhancement

Micro-Anode Guided Electroplating (MAGE) Control System with Digital Imaging Enhancement

This article releases the details of the digital imaging enhancement for the micro-anode guided electroplating MAGE fabrication equipment. The control system architecture, the micro stepping architecture, the electroplating power source, the measurement system, the man machine interface, the control procedure and the digital imaging subsystem are described. The profile of the electroplating deposit during the initiation phase as monitored in real-time by the new imaging subsystem could verify the simulation prediction.

Shyh-Biau Jiang | Tse-Liang Yeh | Dong Liang Lee | Pei Fu Kao

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