Electromechanically coupled feedback loops for microsystems. Application to volatile organic compounds (VOC) sensors
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M. C. Horrillo | I. Sayago | M.C. Horrillo | A. Rodriguez | M. Garcia | J. Amirola | M. Millan | F.J. Gutierrez | F. J. Gutierrez | I. Sayago | M. Garcia | A. Rodríguez | J. Amirola | M. Millan
[1] José Pedro Santos,et al. Micromachined silicon microcantilevers for gas sensing applications with capacitive read-out , 2005 .
[2] K. D. Wise,et al. One-port active polysilicon resonant microstructures , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.