Manufacture and examination of various spin-on glass films with respect to their humidity-sensitive properties

SiO2 films produced by the sol-gel method were optimized with respect to their pore size and pore distribution so that these films are suitable for use as a basic material for thin-film humidity sensors. A capacitive humidity sensor is described which is distinguished by good reversibility, high sensitivity, good linearity, short response time (<10 s) and low cross-sensitivity towards other gases (SO2, CO2, NH3).