Fabrication of sub-micron surface structures on copper, stainless steel and titanium using picosecond laser interference patterning

Abstract Picosecond direct laser interference patterning (ps-DLIP) is investigated theoretically and experimentally for the bulk metals copper, stainless steel and titanium. While surface texturing with nanosecond pulses is limited to feature sizes in the micrometer range, utilizing picosecond pulses can lead to sub-micrometer structures. The modelling and simulation of ps-DLIP are based on the two-temperature model and were carried out for a pulse duration of 35 ps at 515 nm wavelength and a laser fluence of 0.1 J/cm 2 . The subsurface temperature distribution of both electrons and phonons was computed for periodic line-like structures with a pitch of 0.8 μm. The increase in temperature rises for a lower absorption coefficient and a higher thermal conductivity. The distance, at which the maximum subsurface temperature occurs, increases for a small absorption coefficient. High absorption and low thermal conductivity minimize internal heating and give rise to a pronounced surface micro topography with pitches smaller than 1 μm. In order to confirm the computed results, periodic line-like surface structures were produced using two interfering beams of a Yb:YAG-Laser with 515 nm wavelength and a pulse duration of 35 ps. It was possible to obtain a pitch of 0.7 μm on the metallic surfaces.