An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives
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[1] Jingwei Liu,et al. CMOS–MEMS Lateral Electrothermal Actuators , 2008, Journal of Microelectromechanical Systems.
[2] R. Wood,et al. Recording technologies for terabit per square inch systems , 2002 .
[3] S. Timoshenko,et al. Analysis of Bi-Metal Thermostats , 1925 .
[4] Yong Zhu,et al. An electrothermal microactuator with Z-shaped beams , 2010 .
[5] Jin Liu,et al. Analysis and optimization of dynamic response of air bearing sliders to disk waviness , 2005 .
[6] Huikai Xie,et al. A large vertical displacement electrothermal bimorph microactuator with very small lateral shift , 2008 .
[7] Jiaping Yang,et al. An electro-thermal bimorph-based microactuator for precise track-positioning of optical disk drives , 2005 .
[8] Roberto Horowitz,et al. High-bandwidth high-accuracy rotary microactuators for magnetic hard disk drive tracking servos , 1998 .
[9] Don L. DeVoe,et al. Large-force electrothermal linear micromotors , 2004 .
[10] J. F. Creemer,et al. Electrothermal microgripper with large jaw displacement and integrated force sensors , 2008, 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
[11] Hiroyuki Fujita,et al. A MEMS piggyback actuator for hard-disk drives , 2002 .
[12] Weileun Fang,et al. A reliable single-layer out-of-plane micromachined thermal actuator ☆ , 2003 .
[13] Masao Kondo,et al. Rotating Symmetrical Piezoelectric Microactuators for Magnetic Head Drives , 2006 .
[14] Seong-Hun Choe,et al. A thermal driven microactuator for hard disk drive , 2010, 2010 APMRC.
[15] V. Bright,et al. Modeling of thermal actuation in a bulk-micromachined CMOS micromirror , 2000 .
[16] Gih-Keong Lau,et al. Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite , 2012 .
[17] J. Groenesteijn,et al. A CMOS-MEMS rotary microactuator suitable for hard disk drive applications , 2009, TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
[18] Pasqualina M. Sarro,et al. Powerful polymeric thermal microactuator with embedded silicon microstructure , 2007 .