Simplified design relationships for silicon integrated optical pressure sensors based on Mach-Zehnder interferometry with antiresonant reflecting optical waveguides

In this work, simplified design relationships for silicon integrated optical pressure sensors based on Mach-Zehnder interferometry with antiresonant reflecting optical waveguides are derived. In principle, the analysed sensors are made of a striploaded Mach-Zehnder interferometer (MZI), which is placed on a micromachined rectangular silicon membrane as a pressure sensitive element. Analysis and simulation of optomechanical effects including both photoelastic transduction principles and the photonic transport are performed.