The Chemistry of the Semiconductor Industry

Overview. Semiconductor silicon. Group III-V compounds. Group II-VI semiconductors. Chemical vapour deposition. Plasma-enhanced chemical vapour deposition. Metal-organic vapour phase epitaxy. Liquid-phase epitaxy of III-V compounds. Photoresists. X-ray and E-beam resists. Wet etching. Polyimides. Molecular electronics. Computer modelling. Plasma etching. Polymers in plasmas.