Spatial resolution and resolution in phase-shifting laser interferometry

For a simple and effective filtering and derivation method for phase-shifting laser interferometry, spatial resolution and resolution equations before and after the post-image processing are derived theoretically and verified numerically. This paper presents a link between the theoretical resolution study and actual resolution in consideration of post-image processing. Such relations are found by modifying the theoretical solutions in consideration of the characteristic of measured noise field. The performance equations describing the interdependency between resolution and spatial resolution and the relation between the theoretical and experimental resolutions can be a technical tool for designing an optimum post-image processor to achieve a specific spatial resolution and resolution required according to an object to be tested.