论文信息 - Total dose effects on Microelectromechanical Systems (MEMS): accelerometers

Total dose effects on Microelectromechanical Systems (MEMS): accelerometers

Microelectromechanical sensors, ADXL50 and XMMAS40G accelerometers which are fabricated with surface micromachining techniques are characterized for their total dose radiation response. Different failure mechanisms were observed when the sensor element or the whole device was irradiated.

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