Programmable autonomous micromixers and micropumps

Programmable autonomous micromixers and micropumps have been designed and realized via a merger between MEMS and microfluidic tectonics (/spl mu/FT). Advantages leveraged from both fabrication platforms allow for relatively simple and rapid fabrication of these microfluidic components. Nickel (Ni) microstructures, driven by an external rotating magnetic field, are patterned in situ and serve as the microactuators in the devices. /spl mu/FT permits in situ patterning through the use of a step-and-repeat fabrication process known as liquid-phase photopolymerization (LP/sup 3/). LP/sup 3/ is a polymer-based fabrication process tool that offers additional fabrication materials, including responsive hydrogels that expand and contract under different stimuli. Using pH- and temperature-sensitive hydrogels as clutches, autonomous micromixers and micropumps have been fabricated and tested that perform as closed-loop microsystems. The step-and-repeat fabrication process allows pre-programming of the system, like a programmable read-only memory chip, to be sensitive to a desired stimulus. Different Ni blade designs, and pH-sensitive hydrogel geometries and dimensions have been designed and tested to better ascertain their effects on micromixing efficiency and response times of hydrogels (related to the autonomous functionality), respectively. Temperature-responsive hydrogels have allowed for development of temperature-sensitive micromixers and micropumps with applications in areas demanding temperature control. [1498].

[1]  Toyoichi Tanaka,et al.  Collapse of Gels in an Electric Field , 1982, Science.

[2]  M. McHugh,et al.  Pressure-dependent phase transitions in hydrogels , 1990 .

[3]  Toyoichi Tanaka,et al.  Phase transition in polymer gels induced by visible light , 1990, Nature.

[4]  Yong Li,et al.  Kinetics of swelling and shrinking of gels , 1990 .

[5]  S. Gehrke.  Synthesis, equilibrium swelling, kinetics, permeability and applications of environmentally responsive gels , 1993 .

[6]  Eun Sok Kim,et al.  Microfluidic motion generation with acoustic waves , 1998 .

[7]  A. Evans,et al.  Improved characterization technique for micromixers , 1999 .

[8]  Takashi Miyata,et al.  A reversibly antigen-responsive hydrogel , 1999, Nature.

[9]  D. Maillefer,et al.  A high-performance silicon micropump for an implantable drug delivery system , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[10]  K. Nishinari,et al.  Effect of the Introduced Charge on the Thermal Behavior of N-Isopropylacrylamide Gels in Water and NaCl Solutions , 2000 .

[11]  Jin-Woo Choi,et al.  Active microfluidic mixer for mixing of microparticles and liquids , 2000, SPIE MOEMS-MEMS.

[12]  Robin H. Liu,et al.  Microfluidic tectonics: a comprehensive construction platform for microfluidic systems. , 2000, Proceedings of the National Academy of Sciences of the United States of America.

[13]  Robin H. Liu,et al.  Functional hydrogel structures for autonomous flow control inside microfluidic channels , 2000, Nature.

[14]  Z. Yang,et al.  Ultrasonic micromixer for microfluidic systems , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[15]  Robin H. Liu,et al.  Passive mixing in a three-dimensional serpentine microchannel , 2000, Journal of Microelectromechanical Systems.

[16]  Sung-Mo Kang,et al.  Development of a wide tuning range MEMS tunable capacitor for wireless communication systems , 2000, International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).

[17]  P. Renaud,et al.  Polyimide-based microfluidic devices. , 2001, Lab on a Chip.

[18]  M. Barbic,et al.  Electromagnetic micromotor for microfluidics applications , 2001 .

[19]  Il-Joo Cho,et al.  A surface-tension driven micropump for low-voltage and low-power operations , 2002 .

[20]  Kee Suk Ryu,et al.  A magnetic microstirrer and array for microfluidic mixing , 2002 .

[21]  I. Mezić,et al.  Chaotic Mixer for Microchannels , 2002, Science.

[22]  Nam-Trung Nguyen,et al.  MEMS-Micropumps: A Review , 2002 .

[23]  Qing Yu.  Development of Functional Polymeric Materials for Microfluidic Systems , 2002 .

[24]  Adam T Woolley,et al.  Electrically actuated, pressure-driven microfluidic pumps. , 2003, Lab on a chip.

[25]  Andreas Richter,et al.  Electronically controllable microvalves based on smart hydrogels: magnitudes and potential applications , 2003 .

[26]  David J. Beebe,et al.  Magnetically driven temperature-controlled microfluidic actuators , 2004 .

[27]  D. Beebe,et al.  A valved responsive hydrogel microdispensing device with integrated pressure source , 2004, Journal of Microelectromechanical Systems.

[28]  Nam-Trung Nguyen,et al.  A fully polymeric micropump with piezoelectric actuator , 2004 .

[29]  David J. Beebe,et al.  An externally driven magnetic microstirrer , 2004, Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences.

[30]  Chang Liu,et al.  Micro magnetic stir-bar mixer integrated with parylene microfluidic channels. , 2004, Lab on a chip.

[31]  Bartosz A Grzybowski,et al.  Microfluidic mixers: from microfabricated to self-assembling devices , 2004, Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences.

[32]  D. Beebe,et al.  Flow control with hydrogels. , 2004, Advanced drug delivery reviews.

[33]  David J Beebe,et al.  Magnetically-driven biomimetic micro pumping using vortices. , 2004, Lab on a chip.

[34]  Wouter Olthuis,et al.  An efficient method for the fabrication of temperature-sensitive hydrogel microactuators. , 2004, Lab on a chip.

[35]  D. Beebe,et al.  Development and modeling of electrically triggered hydrogels for microfluidic applications , 2005, Journal of Microelectromechanical Systems.