Multiferroic cantilever for power generation using dual functionality

Lead zirconate titanate (PZT)/Ni cantilevers have been developed using the pulsed laser deposition technique for harnessing magnetic as well as mechanical energy. High voltage (1.2 mV, 1.8 mV, and 8.5 mV) and power density (1100, 2400, and 3600 mW/m3) were generated across the PZT/Ni cantilevers (in 3–3 mode) having PZT thin films deposited at 100 mTorr, 200 mTorr, and 300 mTorr oxygen pressures, respectively, at their respective resonance frequencies with 0.5 g acceleration. Maximum power response (3600 mW/m3) was observed at a load resistance of 100 kΩ for the cantilever having PZT film deposited at 300 mTorr oxygen pressure, which is manifested to the efficient ferroelectric and ferromagnetic properties of PZT/Ni system. The power generated from the PZT/Ni cantilever was further enhanced to 18 700 mW/m3 by superimposing magnetic energy with mechanical vibrations. These results are extremely promising for the realization of an efficient energy harvester utilizing both magnetic and mechanical energy.

[1]  Neil M. White,et al.  Self‐powered systems: a review of energy sources , 2001 .

[2]  Christian J. Long,et al.  Energy harvesting properties of all-thin-film multiferroic cantilevers , 2011 .

[3]  Vinay Gupta,et al.  Optical tuning of electrical properties of PZT thin film deposited on STO , 2015, International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors.

[4]  Daniel J. Inman,et al.  Energy Harvesting Technologies , 2008 .

[5]  Nicolas Ledermann,et al.  Piezoelectric Pb(Zrx, Ti1−x)O3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors , 2004 .

[6]  Sang-Gook Kim,et al.  Energy harvesting MEMS device based on thin film piezoelectric cantilevers , 2006 .

[7]  Shuji Tanaka,et al.  Fabrication and characterization of large figure-of-merit epitaxial PMnN-PZT/Si transducer for piezoelectric MEMS sensors , 2016 .

[8]  C. P. Shaw,et al.  Bottom up fabrication of a nickel-lead zirconate titanate piezoelectric microcantilevers , 2009 .

[9]  S. Priya,et al.  Giant Magnetoelectric Effect in PZT Thin Film Deposited on Nickel , 2016 .

[10]  H. Wikle,et al.  The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting , 2008 .

[11]  J. A. Pask,et al.  Reaction Mechanisms in the Formation of PZT Solid Solutions , 1981 .

[12]  Adnan Harb,et al.  Energy harvesting: State-of-the-art , 2011 .

[13]  S. Priya,et al.  Multimodal system for harvesting magnetic and mechanical energy , 2008 .

[14]  S. Beeby,et al.  Energy harvesting vibration sources for microsystems applications , 2006 .

[15]  Lei Wang,et al.  Vibration energy harvesting by magnetostrictive material , 2008 .

[16]  S. Kim,et al.  Ferroelectric devices using lead zirconate titanate (PZT) nanoparticles , 2016, Nanotechnology.

[17]  Henry A. Sodano,et al.  A review of power harvesting using piezoelectric materials (2003–2006) , 2007 .

[18]  I. Yamaguchi,et al.  Effect of substrate material on the crystallinity and epitaxy of Pb(Zr,Ti)O3 thin films , 1999 .

[19]  U. Schnakenberg,et al.  PZT thin films for piezoelectric microactuator applications , 2002 .