论文信息 - Modeling of Focused Ion Beam Trimming of Cantilever Beams - 字舞流文

Modeling of Focused Ion Beam Trimming of Cantilever Beams

Robert B. Darling | R. Darling | T Lam | T. Lam

[1] Steven M. Lepi. Practical Guide to Finite Elements: A Solid Mechanics Approach , 1998 .

[2] E. H. Stevens,et al. The focused ion beam as an integrated circuit restructuring tool , 1986 .

[3] B. Jensen,et al. IMAP: Interferometry for Material Property Measurement in MEMS , 1999 .