70 Gbaud Operation of All-Silicon Mach–Zehnder Modulator based on Forward-Biased PIN Diodes and Passive Equalizer

70 Gbaud NRZ operation of all-silicon Mach–Zehnder modulator was demonstrated using forward-biased PIN diodes integrated with passive equalizers. A clear optical eye opening was obtained owing to a broad electro-optic bandwidth of 37 GHz.