Sol-Gel Derived Ferroelectric Thin Films: Avenues for Control of Microstructural and Electric Properties

The paper presents short review of the works performed during the last few years in the field of the alkoxy-derived ferroelectric films. PZT films were prepared using titanium and zirconium alkoxides and Pb(CH3COO)2· 2H2O as precursors. Different way of lead acetate dehydration and the impact of lead excess in the precursor solutions on the properties of the PZT films are discussed. Trimetallic alkoxide systems Bi(OR)3-Ta(OR)5-ROH (R = Me, Et or i Pr) were studied as precursors for preparation of SrBi2Ta2O9 films. Films prepared from these solutions and annealed at the temperature between 700 and 750°C demonstrated the remanent polarization Pr* − P^r = 7–9 μC/cm2. Ba1-xSrxTiO3 films we applied from modified alkoxide solutions. Decomposition of the organic phase in the course of thermal treatment of the films is studied by IR-spectroscopy. The dependence of the dielectric permittivity of the films via the annealing temperature is reported. Preparation of LiNbO3, SrZr0.2Ti0.8O3, Zr0.8Sn0.2TiO4 is briefly discussed.

[1]  K. Vorotilov,et al.  ALKOXY-DERIVED FERROELECTRIC PZT FILMS: THE EFFECT OF LEAD ACETATE DEHYDRATION TECHNIQUES AND LEAD CONTENT IN THE ELECTROCHEMICALLY PREPARED SOLUTIONS ON THE PROPERTIES OF THE FILMS , 1998 .

[2]  R. Snyder,et al.  Effects of La2O3/ZnO Additives on Microstructure And Microwave Dielectric Properties of Zr0.8Sn0.2TiO4 Ceramics , 1994 .

[3]  L. I. Solov’eva,et al.  PZT ferroelectric films obtained from metal alkoxides by sol-gel processing , 1996 .

[4]  E. Orlova,et al.  BaTiO3 films on silicon wafers from metal alkoxides , 1991 .

[5]  D. Payne,et al.  Structural Investigations of Prehydrolyzed Precursors Used in the Sol‐Gel Processing of Lead Titanate , 1990 .

[6]  O. Auciello A critical comparative review of PZT and SBT - based science and technology for non-volatile ferroelectric memories , 1997 .

[7]  L. Peters Pursuing the perfect low-k dielectric , 1998 .

[8]  V. Petrovsky,et al.  Ferroelectric capacitors for integrated circuits , 1995 .

[9]  Rainer Waser,et al.  Processing and electrical properties of Pb (ZrxTi1−x)O3 (x=0.2–0.75) films: Comparison of metallo‐organic decomposition and sol‐gel processes , 1992 .

[10]  L. I. Solov’eva,et al.  Anodic dissolution of metals in methoxyethanol—a way to new precursors for sol-gel technology , 1994 .

[11]  A. A. Nikulin,et al.  Optical second harmonic generation studies of thin ferroelectric ceramic films , 1997 .

[12]  L. Hrubesh Silica Aerogel: An Intrinsically Low Dielectric Constant Material , 1995 .