Refractive Index of III-metal-polar and N-polar AlGaN Waveguides Grown by Metal Organic Chemical Vapor Deposition

Optical waveguides of III-metal-polar and N-polar AlGaN are grown on sapphire substrates in order to test their use in integrated optics. The dispersion of the ordinary and extraordinary indices of refraction for films with aluminum mole fraction between 0.0 and 0.30 at four discrete wavelengths has been determined by the prism coupling method. The wavelength dependence of the refractive indices is described well by the first-order Sellmeier dispersion formula. The measurements show a small difference in the refractive indices between the two polarities, which is more pronounced at longer wavelengths.

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