The Use of Confocal Light Microscopy in the Study of X-Ray Contact Images on PMMA Resist

The examination of soft X-ray images stored in PMMA resist can be difficult. Small structures or high spatial frequency images are not measurable with standard methods. Using a modified Biorad MRC-500 laser scanning confocal light microscope operated in epi-reflective mode, contact images from soft X-ray experiments have been studied.