Evolution and expansion of SOI in VLSI technologies: Planar to 3D
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□ SOI has enabled industry leadership in planar CMOS exemplified by both digital and analog mixed-signal applications □ Innovative future opportunities for SOI as Industry moves to Fully Depleted Architectures and beyond Uniformity and Variability control are at the forefront! □ Paradigm shift in SOI value proposition as FinFET era arrives.