반도체 공정에 이용되는 지능형 천장 반송 시스템의 최적 중앙제어

There is an Overhead Hoist Transport(OHT) for delivering the wafer in semiconductor processing. The transfer system is consists of carrier. vehicle. rail. and support. OHTCMS(OHT Control and Management System) has to take the feature, such as the optimal control and integration with several OHT. In this paper. ESRA(Efficiency of Shortest - Route Algorithms) is proposed which can be transported optimal route and be prevented collision using the Floyd-Warshall algorithms. The proposed algorithm is verified through consecutive simulation for a long time.