Holographic planar lightwave circuit for on-chip spectroscopy

Computer-generated planar holograms are a powerful approach for designing planar lightwave circuits with unique properties. Digital planar holograms in particular can encode any optical transfer function with high customizability and is compatible with semiconductor lithography techniques and nanoimprint lithography. Here, we demonstrate that the integration of multiple holograms on a single device increases the overall spectral range of the spectrometer and offsets any performance decrement resulting from miniaturization. The validation of a high-resolution spectrometer-on-chip based on digital planar holograms shows performance comparable with that of a macrospectrometer. While maintaining the total device footprint below 2 cm2, the newly developed spectrometer achieved a spectral resolution of 0.15 nm in the red and near infrared range, over a 148 nm spectral range and 926 channels. This approach lays the groundwork for future on-chip spectroscopy and lab-on-chip sensing. An on-chip spectrometer based on digital planar holograms offers a miniature alternative to conventional devices. Developed by three research team in California, USA, the spectrometer uses two computer-designed holograms as high-resolution gratings for separating different wavelengths of light in the spectral bands of 630–694 nm and 766–850 nm. The holograms are made by electron beam lithography and reactive ion etching of a Si/SiO2/Si3N4 substrate. The result is a semiconductor spectrometer chip that occupies a footprint of less than 2 cm2 and boasts a resolution of 0.15 nm and a bandwidth of 148 nm across the red and near-infrared regions. The researchers say that the device’s performance is comparable to much larger conventional instruments and will be a useful component for ‘lab-on-a-chip’ applications such as sensing. They also believe that it should be possible to make even smaller versions with higher performance in the future.

[1]  R. C. Kistler,et al.  Four-channel wavelength division multiplexers and bandpass filters based on elliptical Bragg reflectors , 1990 .

[2]  P. Kiesel,et al.  Fluorescence spectrometer-on-a-fluidic-chip. , 2007, Lab on a chip.

[3]  P. Zhou,et al.  Passive Coherent Polarization Beam Combination of a Four-Fiber Amplifier Array , 2013, IEEE Photonics Journal.

[4]  M. Lipson,et al.  Cavity-enhanced on-chip absorption spectroscopy using microring resonators. , 2008, Optics express.

[5]  S. Babin,et al.  Multiband wavelength demultiplexer based on digital planar holography for on-chip spectroscopy applications. , 2012, Optics letters.

[6]  P. H. Yap,et al.  A micro-optic-fluidic spectrometer with integrated 3D liquid-liquid waveguide , 2007, 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics.

[7]  Reinoud F. Wolffenbuttel,et al.  State-of-the-art in integrated optical microspectrometers , 2004, IEEE Transactions on Instrumentation and Measurement.

[8]  Y Yohan Barbarin,et al.  Extremely small AWG demultiplexer fabricated on InP by using a double-etch Process , 2004 .

[9]  S. Babin,et al.  Multiwavelength Bragg gratings and their application to optical MUX/DEMUX devices , 2003, IEEE Photonics Technology Letters.

[10]  S. Sweeney,et al.  The development of a novel monolithic spectrometer chip concept , 2012 .

[11]  Nadir Dagli,et al.  Integrated Photonics Research , 1998 .

[12]  Diaa Khalil,et al.  Miniaturized tunable integrated Mach-Zehnder MEMS interferometer for spectrometer applications , 2010, MOEMS-MEMS.

[13]  Y. Vlasov,et al.  High Resolution On-chip Spectroscopy Based on Miniaturized Microdonut Resonators References and Links , 2022 .

[14]  Standing wave spectrometer. , 2010, Optics express.

[15]  H. Cao,et al.  Compact spectrometer based on a disordered photonic chip , 2013, Nature Photonics.

[16]  M. Chin,et al.  High-index-contrast waveguides and devices. , 2005, Applied optics.

[17]  S. Babin,et al.  High-Resolution Spectrometer-on-Chip Based on Digital Planar Holography , 2011, IEEE Photonics Journal.

[18]  Siegfried Janz,et al.  High-resolution Fourier-transform spectrometer chip with microphotonic silicon spiral waveguides. , 2013, Optics letters.

[19]  P Waldron,et al.  A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides. , 2007, Optics express.

[20]  Stefano Cabrini,et al.  Digital optical spectrometer-on-chip , 2009 .

[21]  Siegfried Janz,et al.  Multiaperture planar waveguide spectrometer formed by arrayed Mach-Zehnder interferometers. , 2007, Optics express.

[22]  Ali Adibi,et al.  Multimodal multiplex spectroscopy using photonic crystals. , 2003, Optics express.

[23]  Steven J. Spector,et al.  Hybrid multi-mode/single-mode waveguides for low loss , 2004 .

[24]  Stefano Cabrini,et al.  Fabrication of novel digital optical spectrometer on chip , 2009 .

[25]  P. Hariharan,et al.  Optical Holography: Principles, Techniques and Applications , 1987 .

[26]  K. Thyagarajan,et al.  Introduction to fiber optics: An Introduction to Fiber Optics , 1998 .

[27]  Ivan Avrutsky,et al.  Concept of a miniature optical spectrometer using integrated optical and micro-optical components. , 2006, Applied optics.

[28]  Jian-Jun He,et al.  CMOS-Compatible Integrated Spectrometer Based on Echelle Diffraction Grating and MSM Photodetector Array , 2013, IEEE Photonics Journal.

[29]  P. Nath,et al.  Label-free biodetection using a smartphone. , 2013, Lab on a chip.

[30]  Design of Polarization-independent Wavelength Splitter based on Single Directional Coupler , 2005 .

[31]  S. Babin,et al.  Fabrication of digital planar holograms into high refractive index waveguide core for spectroscopy-on-chip applications , 2012 .

[32]  Digital spectrometer-on-chip fabricated by step and repeat nanoimprint lithography on pre-spin coated films , 2011 .

[33]  M. Lipson,et al.  Sub-nm resolution cavity enhanced microspectrometer. , 2010, Optics express.

[34]  Igor Ivonin,et al.  Suppression of lateral modes in wide aperture laser diodes by digital planar holograms , 2011, LASE.

[35]  Heinz W. Engl,et al.  On shape optimization of optical waveguides using inverse problem techniques , 2001 .

[36]  José Higino Correia,et al.  Bulk-micromachined tunable fabry–perot microinterferometer for the visible spectral range , 1999 .

[37]  P. Keliher,et al.  Echelle Grating Spectrometers in Analytical Spectrometry , 1976 .

[38]  B. Momeni,et al.  Integrated photonic crystal spectrometers for sensing applications , 2009 .

[39]  Marc Sorel,et al.  Integrated microspectrometer for fluorescence based analysis in a microfluidic format. , 2012, Lab on a chip.

[40]  I. Kymissis,et al.  Photonic crystal spectrometer. , 2010, Optics express.