Review of phase-measuring interferometry

The theory and practice of phase-measuring interferometry (PMI) are reviewed. The phase measurement algorithms are discussed and phase modulation and wavefront reconstruction are examined as part of the implementation of PMI. The performance limitations of PMI are addressed.

[1]  Y Tsunoda,et al.  Diode laser direct modulation heterodyne interferometer. , 1987, Applied optics.

[2]  J Schwider,et al.  Homogeneity testing by phase sampling interferometry. , 1985, Applied optics.

[3]  T. Asakura,et al.  New common-path phase shifting interferometer using a polarization technique. , 1987, Applied optics.

[4]  D. J. Brangaccio,et al.  Digital wavefront measuring interferometer for testing optical surfaces and lenses. , 1974, Applied optics.

[5]  W. H. Stevenson,et al.  Optical frequency shifting by means of a rotating diffraction grating. , 1970, Applied optics.

[6]  J E Greivenkamp,et al.  Sub-Nyquist interferometry. , 1987, Applied optics.

[7]  Albert F. Slomba,et al.  A Coaxial Interferometer With Low Mapping Distortion , 1978, Optics & Photonics.

[8]  J. Wyant,et al.  Effect of piezoelectric transducer nonlinearity on phase shift interferometry. , 1987, Applied optics.

[9]  C L Koliopoulos,et al.  Interferometric phase measurement using pyroelectric vidicons. , 1987, Applied optics.

[10]  R. Boutellier,et al.  Digital Interferogram Analysis And DIN Norms , 1986, Other Conferences.

[11]  N. A. Massie,et al.  Real-time digital heterodyne interferometry: a system. , 1980, Applied optics.

[12]  H Philip Stahl.  Phase-Measuring Interferometry Performance Parameters , 1987, Optics & Photonics.

[13]  J. Schwider,et al.  Digital wave-front measuring interferometry: some systematic error sources. , 1983, Applied optics.

[14]  Lars A. Selberg.  Interferometer Accuracy And Precision , 1987, Photonics West - Lasers and Applications in Science and Engineering.

[15]  H. Philip Stahl,et al.  Phase-Measuring Interferometric Testing Of Large Diamond-Turned Optics , 1987, Optics & Photonics.