A Low-Frequency MEMS Piezoelectric Energy Harvesting System Based on Frequency Up-Conversion Mechanism

This paper proposes an impact-based micro piezoelectric energy harvesting system (PEHS) working with the frequency up-conversion mechanism. The PEHS consists of a high-frequency straight piezoelectric cantilever (SPC), a low-frequency S-shaped stainless-steel cantilever (SSC), and supporting frames. During the vibration, the frequency up-conversion behavior is realized through the impact between the bottom low-frequency cantilever and the top high-frequency cantilever. The SPC used in the system is fabricated using a new micro electromechanical system (MEMS) fabrication process for a piezoelectric thick film on silicon substrate. The output performances of the single SPC and the PEHS under different excitation accelerations are tested. In the experiment, the normalized power density of the PEHS is 0.216 μW·g−1·Hz−1·cm−3 at 0.3 g acceleration, which is 34 times higher than that of the SPC at the same acceleration level of 0.3 g. The PEHS can improve the output power under the low frequency and low acceleration scenario.

[1]  Sheng Wen,et al.  Piezoelectric Wind Energy Harvesting from Self-Excited Vibration of Square Cylinder , 2016, J. Sensors.

[2]  T. Galchev,et al.  A Piezoelectric Parametric Frequency Increased Generator for Harvesting Low-Frequency Vibrations , 2012, Journal of Microelectromechanical Systems.

[3]  L. Yao,et al.  Nonlinear dynamic characteristics of piezoelectric bending actuators under strong applied electric field , 2004, Journal of Microelectromechanical Systems.

[4]  Chengkuo Lee,et al.  Piezoelectric MEMS-based wideband energy harvesting systems using a frequency-up-conversion cantilever stopper , 2012 .

[5]  Jingquan Liu,et al.  High-performance low-frequency MEMS energy harvester via partially covering PZT thick film , 2018, Journal of Micromechanics and Microengineering.

[6]  Danick Briand,et al.  Vibrational piezoelectric energy harvesters based on thinned bulk PZT sheets fabricated at the wafer level , 2014 .

[7]  Farid Ullah Khan,et al.  Multi-mode vibration based electromagnetic type micro power generator for structural health monitoring of bridges , 2018 .

[8]  Y. V. Andel,et al.  Vibration energy harvesting with aluminum nitride-based piezoelectric devices , 2009 .

[9]  Dongjae Han,et al.  Piezoelectric energy harvester using mechanical frequency up conversion for operation at low-level accelerations and low-frequency vibration , 2015 .

[10]  Chunsheng Yang,et al.  High performance PZT thick films based on bonding technique for d31 mode harvester with integrated proof mass , 2014 .

[11]  K. Najafi,et al.  Energy Scavenging From Low-Frequency Vibrations by Using Frequency Up-Conversion for Wireless Sensor Applications , 2008, IEEE Sensors Journal.

[12]  Yue Yin,et al.  A wireless sensor network node designed for exploring a structural health monitoring application , 2007 .

[13]  C. Livermore,et al.  Impact-driven, frequency up-converting coupled vibration energy harvesting device for low frequency operation , 2011 .

[14]  Chunsheng Yang,et al.  Development of high performance piezoelectric d33 mode MEMS vibration energy harvester based on PMN-PT single crystal thick film , 2014 .

[15]  Chang-Hyeon Ji,et al.  Impact-based piezoelectric vibration energy harvester , 2018 .

[16]  E. Thomsen,et al.  High-performance piezoelectric thick film based energy harvesting micro-generators for MEMS , 2010 .

[17]  Anis Nurashikin Nordin,et al.  Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters , 2012 .

[18]  Z. Wen,et al.  A micro-electromechanical systems based vibration energy harvester with aluminum nitride piezoelectric thin film deposited by pulsed direct-current magnetron sputtering , 2018, Applied Energy.

[19]  Chengwei Yuan,et al.  High Voltage Output MEMS Vibration Energy Harvester in $d_{31}$ Mode With PZT Thin Film , 2014, Journal of Microelectromechanical Systems.

[20]  Jun Cai,et al.  Modeling and experimental investigation of an AA-sized electromagnetic generator for harvesting energy from human motion , 2018, Smart Materials and Structures.

[21]  S. Joshi,et al.  Effect of post-deposition annealing on transverse piezoelectric coefficient and vibration sensing performance of ZnO thin films , 2014 .

[22]  Salvatore Baglio,et al.  Modeling a Nonlinear Harvester for Low Energy Vibrations , 2019, IEEE Transactions on Instrumentation and Measurement.

[23]  Susumu Sugiyama,et al.  Wafer bonding of lead zirconate titanate to Si using an intermediate gold layer for microdevice application , 2006 .

[24]  Jun Chen,et al.  Triboelectric–Pyroelectric–Piezoelectric Hybrid Cell for High‐Efficiency Energy‐Harvesting and Self‐Powered Sensing , 2015, Advanced materials.

[25]  Weijie Dong,et al.  Vibration piezoelectric energy harvester with multi-beam , 2015 .

[26]  E. Thomsen,et al.  MEMS-based thick film PZT vibrational energy harvester , 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

[27]  Chengkuo Lee,et al.  A rotational pendulum based electromagnetic/triboelectric hybrid-generator for ultra-low-frequency vibrations aiming at human motion and blue energy applications , 2019, Nano Energy.

[28]  M. Umeda,et al.  Energy Storage Characteristics of a Piezo-Generator using Impact Induced Vibration , 1997 .

[29]  Tao Chen,et al.  Modeling and verification of a piezoelectric frequency-up-conversion energy harvesting system , 2017 .

[30]  S. Jung,et al.  Energy-harvesting device with mechanical frequency-up conversion mechanism for increased power efficiency and wideband operation , 2010 .

[31]  Qinxue Tan,et al.  A monostable piezoelectric energy harvester for broadband low-level excitations , 2018 .

[32]  Fei Wang,et al.  Micro electrostatic energy harvester with both broad bandwidth and high normalized power density , 2018 .

[33]  Keisuke Uenishi,et al.  Electrostatic MEMS Vibration Energy Harvesters inside of Tire Treads , 2019, Sensors.

[34]  Wen-Jong Wu,et al.  Fabrication of PZT MEMS energy harvester based on silicon and stainless-steel substrates utilizing an aerosol deposition method , 2013 .

[35]  O. Hansen,et al.  Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

[36]  Chengkuo Lee,et al.  A non-resonant rotational electromagnetic energy harvester for low-frequency and irregular human motion , 2018, Applied Physics Letters.

[37]  S. Sugiyama,et al.  Fabrication and analysis of high-performance piezoelectric MEMS generators , 2012 .

[38]  Faisal Karim Shaikh,et al.  Energy harvesting in wireless sensor networks: A comprehensive review , 2016 .

[39]  Jae Yeong Park,et al.  Theoretical modeling and analysis of mechanical impact driven and frequency up-converted piezoelectric energy harvester for low-frequency and wide-bandwidth operation , 2014 .

[40]  Dong Sung Kim,et al.  Biomimetic anti-reflective triboelectric nanogenerator for concurrent harvesting of solar and raindrop energies , 2019, Nano Energy.

[41]  Jianmin Miao,et al.  Acoustic transducers with a perforated damping backplate based on PZT/silicon wafer bonding technique , 2009 .

[42]  Eric M. Yeatman,et al.  A piezoelectric frequency up-converting energy harvester with rotating proof mass for human body applications , 2014 .

[43]  C. Kang,et al.  Flexible piezoelectric polymer-based energy harvesting system for roadway applications , 2017 .