RF MEMS capacitive switch with leaky nanodiamond dielectric film
暂无分享,去创建一个
Yonhua Tzeng | E. Kohn | J. Mao | Y. Tzeng | Erhard Kohn | Chin-Hung Wang | Changwei Chen | Chin Hung Wang | Jun Kai Mao | Changwei Chen
[1] Zhen Peng,et al. A transient SPICE model for dielectric-charging effects in RF MEMS capacitive switches , 2006, IEEE Transactions on Electron Devices.
[2] Stepan Lucyszyn,et al. Three-Dimensional RF MEMS Switch for Power Applications , 2009, IEEE Transactions on Industrial Electronics.
[3] Luis Castañer,et al. Modeling and measuring transient discharge current of microelectromechanical switches after dielectric charging by voltage stress , 2009 .
[4] I. Lin,et al. Low temperature growth of ultrananocrystalline diamond film and its field emission properties , 2006 .
[5] L. Colombo,et al. On the electrical activity of sp2-bonded grain boundaries in nanocrystalline diamond , 1999 .
[6] Milos Nesladek,et al. Growth, electronic properties and applications of nanodiamond , 2008 .
[7] Patrick Pons,et al. Voltage and temperature effect on dielectric charging for RF-MEMS capacitive switches reliability investigation , 2008, Microelectron. Reliab..
[8] I. Lin,et al. Effects of hydrogen additive on microwave plasma CVD of nanocrystalline diamond in mixtures of argon and methane , 2004 .
[9] Hidemi Ishiuchi,et al. An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors , 2007 .
[10] John L. Volakis,et al. Robust Design of RF-MEMS Cantilever Switches Using Contact Physics Modeling , 2009, IEEE Transactions on Industrial Electronics.
[11] I. Lin,et al. Growth of microcrystalline and nanocrystalline diamond films by microwave plasmas in a gas mixture of 1% methane/5% hydrogen/94% argon , 2004 .
[12] Nora Finch,et al. Design of A Novel Bulk Micro-machined RF MEMS Switch , 2002 .
[13] Seeding, growth and characterization of nanocrystalline diamond films on various substrates , 2006 .
[14] N. Lobontiu. Mechanics of microelectromechanical systems , 2004 .
[15] Y. Lai,et al. Investigation of Structures of Microwave Microelectromechanical-System Switches by Taguchi Method , 2007 .
[16] Yeong-Lin Lai,et al. Design of electrostatically actuated MEMS switches , 2008 .
[17] Rui F. Silva,et al. Nano- and micro-crystalline diamond growth by MPCVD in extremely poor hydrogen uniform plasmas , 2007 .
[18] Benno Margesin,et al. Electromechanical characterization of low actuation voltage RF MEMS capacitive switches based on DC CV measurements , 2007 .
[19] Ryutaro Maeda,et al. Development of hafnium oxynitride dielectrics for radio-frequency-microelectromechanical system capacitive switches , 2007 .
[20] Yeong-Lin Lai,et al. Characteristics of Radio-Frequency Microelectromechanical-System Switches for Communication Systems , 2007 .
[21] S. Eshelman,et al. Micromachined low-loss microwave switches , 1999 .
[22] M. Nagatsu,et al. Characteristics of nano-crystalline diamond films prepared in Ar/H2/CH4 microwave plasma , 2007 .
[23] C. Goldsmith,et al. Acceleration of Dielectric Charging in RF MEMS Capacitive Switches , 2006, IEEE Transactions on Device and Materials Reliability.
[24] Patrick Pons,et al. Structure dependent charging process in RF MEMS capacitive switches , 2007, Microelectron. Reliab..
[25] I. Tekin,et al. Diamond semiconductor technology for RF device applications , 2005 .
[26] Y. Tzeng,et al. Diamond CVD by microwave plasmas in argon-diluted methane without or with 2% hydrogen additive , 2005 .