Design-technology co-optimization overview of CFET architecture

Fin depopulation, thinner and taller fins, and the step towards Nanosheet technologies has been helping in maintaining the rhythm of the semiconductor technology roadmap. Nevertheless, further area scaling causes a drastic reduction in active width as well as a challenging routability. On this regard, the Complementary-FET is a strong contender as device for next generation technologies. The stack of p- on n-FETs offers several opportunities for device scaling and optimization. However, it also poses several challenges that need to be carefully analyzed in a design-technology cooptimization framework.

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