论文信息 - Self-Assembly of Nanovoids in Si Microcrystals Epitaxially Grown on Deeply Patterned Substrates - 字舞流文

Self-Assembly of Nanovoids in Si Microcrystals Epitaxially Grown on Deeply Patterned Substrates

A. Voigt | D. Paul | G. Isella | R. Bergamaschini | L. Miglio | K. Volz | F. Montalenti | J. Valente | A. Beyer | A. Ballabio | M. Albani | M. Salvalaglio | A. Barzaghi | S. Firoozabadi