论文信息 - Mid-IR imaging of doped silicon gratings at a decananometer scale - 字舞流文

Mid-IR imaging of doped silicon gratings at a decananometer scale

P. Royer | S. Blaize | N. Rochat | A. Bruyant | P. Morin | N. Chevalier | Z. Sedaghat | M. Kazan | J. Vaillant | Enric Garcia-Caudel