Low temperature co-fired ceramics (LTCC) microsystems

Corresponding author: Leszek.Golonka@pwr.wroc.plThe paper presents general information on ceramic microsystems. Low temperature co-firedceramics (LTCC) technology is described in detail. Research and development on the LTCCsensors and microsystems carried out at Wroclaw University of Technology (Poland) arepresented. Microfluidic system, polymerase chain reaction (PCR) microreactor, accelerationsensor and sol–gel fiber optics for ceramic microsystems are described. Keywords: low temperatur e co-fired ceramics (LTCC), microsyst em, polymerase chain reaction (PCR),microreactor.

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