论文信息 - OPC accuracy improvement through deep-learning based etch model - 字舞流文

OPC accuracy improvement through deep-learning based etch model

Y. Xi | Yongfa Fan | Yuqian Chen | Wenhao Pan | Bilun Zhang | Jinlai Cheng | Leiwu Zheng | Jinze Wang | Weina Shi | Liangqi Zhu | Jiao Huang | Qian Xie | Yuanxia Zheng | Yu Zhao