A comparative analysis of a-C:H by infrared spectroscopy and mass selected thermal effusion

A comparative analysis of quantitative infrared absorption spectra and mass selected thermal effusion transients measured for a large number of hydrogenated amorphous carbon (a-C:H) films is presented in order to establish reliable IR absorption cross sections for the different hydrogen bonding configurations in the material. The structural character of the material and the hydrogen concentration were varied over a wide range from soft and wide band gap polymerlike a-C:H, via so-called diamondlike carbon, to the tetrahedral form of a-C:H deposited from a plasma beam source. The results show that the IR absorption cross sections from molecular hydrocarbons can well be transferred to the solid state as long as the material is of polymeric character, but that this procedure fails as soon as the material converts into a three-dimensional cross-linked and mechanically hard structure. For the latter material an empirical average IR absorption cross section for the C–H stretch band can nevertheless be determined...

[1]  L. Ley,et al.  Effective correlation energies for defects in a-C:H from a comparison of photelectron yield and electron spin resonance experiments , 1995 .

[2]  H. Ehrhardt,et al.  Plasma beam deposition of highly tetrahedrally bonded amorphous carbon , 1994 .

[3]  Olaf Stenzel,et al.  The optical constants of the so-called «diamond-like» carbon layers and their description in terms of semiempirical dispersion models , 1993 .

[4]  Kelires.  Structural properties and energetics of amorphous forms of carbon. , 1993, Physical review. B, Condensed matter.

[5]  G. Herzberg,et al.  Molecular Spectra and Molecular Structure , 1992 .

[6]  H. Ehrhardt,et al.  Characterization of a CH4-RF-plasma by ion flux, Langmuir probe, and optical emission spectroscopy measurements , 1992 .

[7]  P. Koidl,et al.  Diamond and diamond-like films and coatings , 1991 .

[8]  P. Koidl,et al.  Plasma Deposition, Properties and Structure of Amorphous Hydrogenated Carbon Films , 1991 .

[9]  Robertson,et al.  Electronic and atomic structure of amorphous carbon. , 1987, Physical review. B, Condensed matter.

[10]  Y. Catherine,et al.  Structure and physical properties of plasma-grown amorphous hydrogenated carbon films , 1987 .

[11]  H. Okamoto,et al.  Hydrogen Content in a-SiC:H Films Prepared by Plasma Decomposition of Silane and Methane or Ethylene , 1984 .

[12]  A. K. Green,et al.  Thermal annealing study of carbon films formed by the plasma decomposition of hydrocarbons , 1984 .

[13]  W. Beyer,et al.  Reinterpretation of the silicon-hydrogen stretch frequencies in amorphous silicon , 1983 .

[14]  D. Mckenzie,et al.  Properties and structure of amorphous hydrogenated carbon films , 1983 .

[15]  A. Bubenzer,et al.  Bonding in hydrogenated hard carbon studied by optical spectroscopy , 1983 .

[16]  A. Bubenzer,et al.  Hard carbon coatings with low optical absorption , 1983 .

[17]  Tatsuo Shimizu,et al.  NMR and IR Studies on Hydrogenated Amorphous Si1-xCx Films , 1982 .

[18]  G. Socrates,et al.  Infrared Characteristic Group Frequencies , 1980 .

[19]  M. Cardona,et al.  Vibrational spectrum of hydrogenated amorphous SiC films , 1979 .

[20]  D. Hummel,et al.  Atlas der Polymer- und Kunststoffanalyse , 1978 .

[21]  Hugo Volkmann.  Handbuch der Infrarot-Spektroskopie , 1972 .

[22]  R. E. Erickson,et al.  Infrared band handbook , 1970 .

[23]  D. O. Hummel,et al.  Ultrarot-Spektrum und chemische Konstitution , 1968 .

[24]  L. J. Bellamy.  Advances in infrared group frequencies , 1968 .

[25]  A. S. Wexler.  Integrated Intensities of Absorption Bands in Infrared Spectroscopy , 1967 .

[26]  A. S. Wexler.  Infrared determination of structural units in organic compounds by integrated intensity measurements: Alkanes, alkenes and monosubstituted alkyl benzenes☆ , 1965 .

[27]  S. Wiberley,et al.  Introduction to infrared and Raman spectroscopy , 1965 .

[28]  C. Rao,et al.  Chemical Applications of Infrared Spectros-copy , 1963 .

[29]  J. H. Jaffe,et al.  Infrared Intensities in Liquids , 1956 .

[30]  A. Duncan,et al.  Chemical applications of spectroscopy , 1956 .