A low voltage actuated micromachined microwave switch using torsion springs and leverage

In this paper, a push-pull type microwave switch is proposed, which utilizes torsion springs and leverage for low-voltage operation. The switching operation up to 4 GHz is demonstrated. The actuation voltage is /spl sim/5 V. The insertion loss of /spl sim/1 dB and the isolation as high as /spl sim/40 dB at 1 GHz are achieved by the push-pull operation.

[1]  Lawrence E. Larson,et al.  Micromachined microwave actuator (MIMAC) technology-a new tuning approach for microwave integrated circuits , 1991, IEEE 1991 Microwave and Millimeter-Wave Monolithic Circuits Symposium. Digest of Papers.

[2]  M. F. Chang,et al.  A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 Ghz , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[3]  S. Eshelman,et al.  Characteristics of micromachined switches at microwave frequencies , 1996, 1996 IEEE MTT-S International Microwave Symposium Digest.

[4]  Kristofer S. J. Pister,et al.  Microrelays for batch transfer integration in RF systems , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[5]  Geun-Ho Kim,et al.  Electroplated rf MEMS capacitive switches , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[6]  Gabriel M. Rebeiz,et al.  30 GHz tuned MEMS switches , 1999, 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282).

[7]  S. Eshelman,et al.  Performance of low-loss RF MEMS capacitive switches , 1998 .

[8]  Adele E. Schmitz,et al.  GaAs-compatible surface-micromachined RF MEMS switches , 1999 .

[9]  C. Nguyen,et al.  Micromechanical electrostatic K-band switches , 1998, 1998 IEEE MTT-S International Microwave Symposium Digest (Cat. No.98CH36192).

[10]  K. Suzuki,et al.  A micromachined RF microswitch applicable to phased-array antennas , 1999, 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282).