Cross-sections for electron scattering accompanied by ionization of inner- shells

A method is presented to describe the electron scattering process at an ionization of inner-shell electrons. The differential cross-section with the energy transfer and the momentum transfer is calculated using the expression of the generalized oscillator strength. This cross-section and the total ionization cross-section are fairly close to the results obtained by the Gryzinski equation. The photo-absorption cross-section obtained by the present treatment shows good agreement with the experimental data in a wide range of the photon energy. Based on the present treatment, the scattering angle distribution of the primary electron is calculated.

[1]  P. Rez.  Electron ionization cross-sections for K, L and M shells , 1984 .

[2]  R. Shimizu,et al.  A Monte Carlo calculation of low-energy secondary electron emission from metals , 1974 .

[3]  J. Scofield.  K- and L-shell ionization of atoms by relativistic electrons , 1978 .

[4]  N. Stolterfoht,et al.  Energy and angular distribution of electrons ejected from helium by fast protons and electrons: Theory and experiment , 1975 .

[5]  Masatoshi Kotera,et al.  A Monte Carlo simulation of primary and secondary electron trajectories in a specimen , 1989 .

[6]  John Arents,et al.  Atomic Structure Calculations , 1964 .

[7]  R. Leapman,et al.  K, L, and M shell generalized oscillator strengths and ionization cross sections for fast electron collisions , 1980 .

[8]  J. Cooper,et al.  Photo-Ionization in the Soft x-Ray Range: 1 Z Dependence in a Central-Potential Model , 1968 .

[9]  K. Murata.  Spatial distribution of backscattered electrons in the scanning electron microscope and electron microprobe , 1974 .

[10]  Z. Ding,et al.  Monte Carlo study of backscattering and secondary electron generation , 1988 .

[11]  Mitio Inokuti,et al.  Inelastic Collisions of Fast Charged Particles with Atoms and Molecules-The Bethe Theory Revisited , 1971 .

[12]  S. Manson.  INELASTIC COLLISIONS OF FAST CHARGED PARTICLES WITH ATOMS: IONIZATION OF THE ALUMINUM L SHELL. , 1972 .

[13]  C. Eyermann,et al.  Core-electron binding energies for gaseous atoms and molecules , 1984 .

[14]  R. Bonham,et al.  Analytical Expressions for the Hartree—Fock Potential of Neutral Atoms and for the Corresponding Scattering Factors for X Rays and Electrons , 1964 .

[15]  E. J. Mcguire.  INELASTIC SCATTERING OF ELECTRONS AND PROTONS BY THE ELEMENTS He TO Na. , 1971 .

[16]  Masatoshi Kotera,et al.  A Simulation of Electron Scattering in Metals , 1990 .

[17]  S. M. Goldberg,et al.  Photoionization cross-sections for atomic orbitals with random and fixed spatial orientation , 1981 .