On Switching Control Design for Rigid-Flexible Coupling Motion Stage

With the development of electronics manufacturing, high-precision stage needs to meet the growing demand for performance. A novel structure, rigid-flexible coupling motion stage is featured with high control performance under different working conditions. On the other hand, to dynamic characteristics is changeable in the process of stage motion, such that the controller is needed to accommodate changes. In order to give full play of the stage performance, a switch control strategy is designed in this paper. By judging whether the dynamic characteristics of the system have changed, switching control strategy with proportional/proportional-integral (P/PI) controllers, called segmented P/PI controllers, is carried out on the stage. Experimental results indicate that, compared to the single P/PI controller, the setting time of using segmented P/PI controllers reduces drastically and the superior positioning accuracy can be maintained.

[1]  Lu Fan Zhang,et al.  Control Analysis of Point-to-Point Positioning Based on Macro-Micro Stage , 2013 .

[2]  Chee Khiang Pang,et al.  Integrated Servo-Mechanical Design of a Fine Stage for a Coarse/Fine Dual-Stage Positioning System , 2016, IEEE/ASME Transactions on Mechatronics.

[3]  Chee Khiang Pang,et al.  A Flexure-Based Parallel Actuation Dual-Stage System for Large-Stroke Nanopositioning , 2017, IEEE Transactions on Industrial Electronics.

[4]  George Ellis Control System Design Guide: Using Your Computer to Understand and Diagnose Feedback Controllers , 1991 .

[5]  Yoichi Hori,et al.  Method of Shortening Settling Time Using Final State Control for High‐Precision Stage with Decouplable Structure of Fine and Coarse Parts , 2016 .

[6]  Dong-Choon Lee,et al.  Automatic Mode Switching of P/PI Speed Control for Industry Servo Drives Using Online Spectrum Analysis of Torque Command , 2007, IEEE Transactions on Industrial Electronics.

[7]  S. V. Sreenivasan,et al.  Kinematic design of large displacement precision XY positioning stage by using cross strip flexure joints and over-constrained mechanism , 2008 .

[8]  Eddie Kobeda,et al.  Critical success factors for electronic manufacturing services , 2016, 2016 Pan Pacific Microelectronics Symposium (Pan Pacific).

[9]  Kenta Seki,et al.  Robust vibration suppression control for resonant frequency variations in dual-stage actuator-driven load devices , 2015, 2015 IEEE International Conference on Mechatronics (ICM).

[10]  Zhijun Yang,et al.  A Novel Motion Stage Design by Reducing Disturbance Bandwidth of ADRC for Higher Performance , 2019, 2019 Chinese Control Conference (CCC).

[11]  Wenchao Xue,et al.  Comparison of Several Active Disturbance Rejection Control Methods for Rigid-Flexible Coupling Motion Stage , 2019, 2019 Chinese Control Conference (CCC).