论文信息 - Calculation of the performance of magnetic lenses with limited machining precision.

Calculation of the performance of magnetic lenses with limited machining precision.

To meet a required STEM resolution, the mechanical precision of the pole pieces of a magnetic lens needs to be determined. A tolerancing plugin in the EOD software is used to determine a configuration which both meets the optical specifications and is cost effective under the constraints of current manufacturing technologies together with a suitable combination of correction elements.

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