What industry needs in a high-power excimer laser

operations on high power excimer lasers, 100 to 200 Watts, operating three shifts a day, seven days a week.The issues of durability, reliability, serviceability, and cost will be addressed.2. INTRODUC'I'IONSince the invention of the excimer laser in the mid- 1970s, numerous papers have been written on their use inmaterials processing of microelectronic circuits. The first reported production-line use of excimer lasers for