Distortion of 3D SU8 photonic structures fabricated by four-beam holographic lithography withumbrella configuration.

We present a quantitative study of the distortion from a threeterm diamond-like structure fabricated in SU8 polymer by four-beam holographic lithography. In the study of the refraction effect, theory suggests that the lattice in SU8 should be elongated in the [111] direction but have no distortion in the (111) plane, and each triangular-like hole array in the (111) plane would rotate by ~30 degrees away from that in air. Our experiments agree with the prediction on the periodicity in the (111) plane and the rotation due to refraction effect, however, we find that the film shrinkage during lithographic process has nearly compensated the predicted elongation in the [111] direction. In study of photonic bandgap (PBG) properties of silicon photonic crystals templated by the SU8 structure, we find that the distortion has decreased quality of PBG.

[1]  Martin Maldovan,et al.  Triply periodic bicontinuous structures through interference lithography: a level-set approach. , 2003, Journal of the Optical Society of America. A, Optics, image science, and vision.

[2]  R. G. Denning,et al.  Fabrication of photonic crystals for the visible spectrum by holographic lithography , 2000, Nature.

[3]  T. Hahn.  International tables for crystallography , 2002 .

[4]  Stephen Barlow,et al.  65 nm feature sizes using visible wavelength 3-D multiphoton lithography. , 2007, Optics express.

[5]  Kurt Busch,et al.  Three-dimensional face-centered-cubic photonic crystal templates by laser holography: fabrication, optical characterization, and band-structure calculations , 2003 .

[6]  Y. Zhong,et al.  Photonic crystal with diamond-like structure fabricated by holographic lithography , 2005, (CLEO). Conference on Lasers and Electro-Optics, 2005..

[7]  Peter R. Herman,et al.  Design and holographic fabrication of tetragonal and cubic photonic crystals with phase mask: toward the mass-production of three-dimensional photonic crystals , 2005 .

[8]  P. Herman,et al.  Effect of structural variation on the photonic band gap in woodpile photonic crystal with body-centered-cubic symmetry , 2005 .

[9]  Michael J. Brett,et al.  Fabrication of Tetragonal Square Spiral Photonic Crystals , 2002 .

[10]  Srinivas Sridhar,et al.  Photonic crystals: Imaging by flat lens using negative refraction , 2003, Nature.

[11]  Ali Adibi,et al.  Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography , 2006, SPIE OPTO.

[12]  Kurt Busch,et al.  Shrinkage Precompensation of Holographic Three‐Dimensional Photonic‐Crystal Templates , 2006 .

[13]  S. Shi,et al.  Polymer-Based Photonic Crystals , 2005 .

[14]  Yuankun Lin,et al.  Woodpile-type photonic crystals with orthorhombic or tetragonal symmetry formed through phase mask techniques. , 2006, Optics express.

[15]  Seth R. Marder,et al.  Materials for Multiphoton 3D Microfabrication , 2007 .

[16]  Yongan Xu,et al.  Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography , 2007, SPIE OPTO.

[17]  R. Sutherland,et al.  Switchable orthorhombic F photonic crystals formed by holographic polymerization-induced phase separation of liquid crystal. , 2002, Optics express.

[18]  S. John,et al.  Photonic band gap templating using optical interference lithography. , 2005, Physical review. E, Statistical, nonlinear, and soft matter physics.

[19]  Steven G. Johnson,et al.  Block-iterative frequency-domain methods for Maxwell's equations in a planewave basis. , 2001, Optics express.

[20]  Nikos Hadjichristidis,et al.  Polymer‐Based Photonic Crystals , 2001 .

[21]  Yongan Xu,et al.  Triply Periodic Bicontinuous Structures as Templates for Photonic Crystals: A Pinch‐off Problem , 2007 .

[22]  T. Asano,et al.  High-Q photonic nanocavity in a two-dimensional photonic crystal , 2003, Nature.

[23]  Rui Ma,et al.  Icosahedral quasicrystals for visible wavelengths by optical interference holography. , 2007, Optics express.

[24]  Stefan Linden,et al.  Polarization Stop Bands in Chiral Polymeric Three‐Dimensional Photonic Crystals , 2007 .

[25]  J. Lewis,et al.  Microperiodic structures: Direct writing of three-dimensional webs , 2004, Nature.

[26]  Saulius Juodkazis,et al.  Three‐Dimensional Spiral‐Architecture Photonic Crystals Obtained By Direct Laser Writing , 2005 .

[27]  J. Joannopoulos,et al.  High Transmission through Sharp Bends in Photonic Crystal Waveguides. , 1996, Physical review letters.

[28]  J. Sturm,et al.  On-chip natural assembly of silicon photonic bandgap crystals , 2001, Nature.

[29]  Y. Zhong,et al.  Formation principles of two-dimensional compound photonic lattices by one-step holographic lithography. , 2005, Optics express.

[30]  E. Yablonovitch,et al.  Inhibited spontaneous emission in solid-state physics and electronics. , 1987, Physical review letters.

[31]  John A Rogers,et al.  Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks. , 2004, Proceedings of the National Academy of Sciences of the United States of America.

[32]  Kurt Busch,et al.  Three-dimensional photonic crystals by holographic lithography using the umbrella configuration: Symmetries and complete photonic band gaps , 2004 .

[33]  Michael Scalora,et al.  The photonic band edge laser: A new approach to gain enhancement , 1994 .

[34]  Max Born,et al.  Principles of optics - electromagnetic theory of propagation, interference and diffraction of light (7. ed.) , 1999 .

[35]  L Z Cai,et al.  All fourteen Bravais lattices can be formed by interference of four noncoplanar beams. , 2002, Optics letters.

[36]  Mischa Megens,et al.  Creating Periodic Three-Dimensional Structures by Multibeam Interference of Visible Laser , 2002 .

[37]  Elton Graugnard,et al.  Infiltration and Inversion of Holographically Defined Polymer Photonic Crystal Templates by Atomic Layer Deposition , 2006 .

[38]  Ovidiu Toader,et al.  Photonic band-gap formation by optical-phase-mask lithography. , 2006, Physical review. E, Statistical, nonlinear, and soft matter physics.

[39]  Tianyue Yu,et al.  An efficient two-photon-generated photoacid applied to positive-tone 3D microfabrication. , 2002, Science.

[40]  John,et al.  Strong localization of photons in certain disordered dielectric superlattices. , 1987, Physical review letters.

[41]  Bradley K. Smith,et al.  A three-dimensional photonic crystal operating at infrared wavelengths , 1998, Nature.

[42]  Shu Yang,et al.  Photonic crystals through holographic lithography: Simple cubic, diamond-like, and gyroid-like structures , 2004 .

[43]  Susumu Noda,et al.  Highly confined waveguides and waveguide bends in three-dimensional photonic crystal , 1999 .

[44]  Daniel M. Mittleman,et al.  Superprism phenomenon in three-dimensional macroporous polymer photonic crystals , 2003 .

[45]  Saulius Juodkazis,et al.  Reduction of capillary force for high-aspect ratio nanofabrication , 2005 .

[46]  M. Despont,et al.  SU-8: a low-cost negative resist for MEMS , 1997 .