Epitaxial growth of Pt(0 0 1) thin films on Si substrates using an epitaxial γ-Al2O3(0 0 1) buffer layer

[1]  S. S. Kim,et al.  Change of growth orientation in Pt films epitaxially grown on MgO(001) substrates by sputtering , 2002 .

[2]  D. Akai,et al.  Fabrication of the Si/Al2O3/SiO2/Si Structure Using O2 Annealed Al2O3/Si Structure , 2000 .

[3]  Makoto Ishida,et al.  Development of Surface Morphology of Epitaxial Al2O3 on Silicon by Controlling Reaction between Oxygen and Silicon Surface , 1999 .

[4]  W. Lee,et al.  Growth of highly oriented Pt(100) thin films on a MgO(100) seed layer deposited on Si(100) substrates by rf magnetron sputtering , 1997 .

[5]  R. Sinclair,et al.  Epitaxial Pt(001), Pt(110), and Pt(111) films on MgO(001), MgO(110), MgO(111), and Al2O3(0001) , 1992 .

[6]  Toshio Ogawa,et al.  Controlling the Crystal Orientations of Lead Titanate Thin Films , 1991 .

[7]  M. Ishida,et al.  Heteroepitaxial Si/Al2O3/Si structures , 1989 .

[8]  M. Ishida,et al.  Metalorganic molecular beam epitaxy of γ‐Al2O3 films on Si at low growth temperatures , 1988 .

[9]  M. Ishida,et al.  Epitaxial Al2O3 films on Si by low‐pressure chemical vapor deposition , 1988 .

[10]  Yoshihiro Tomita,et al.  Preparation of c‐axis oriented PbTiO3 thin films and their crystallographic, dielectric, and pyroelectric properties , 1986 .

[11]  W. J. Merz The Electric and Optical Behavior of BaTi O 3 Single-Domain Crystals , 1949 .

[12]  S. Baik,et al.  Effects of surface structures of MgO(100) single crystal substrates on ferroelectric PbTiO3 thin films grown by radio frequency sputtering , 1995 .

[13]  M. Okuyama,et al.  Ferroelectric PbTiO3 thin films and their application , 1991 .