论文信息 - Silicon Torsional Scanning Mirror

Silicon Torsional Scanning Mirror

Conventional batch photolithography and thin film techniques are employed to fabricate an electrostatically driven torsional scanning mirror from single-crystal silicon. This device is extremely simple to make and operate, has operational characteristics comparable to commercial magnetically driven high-frequency scanners, and has exhibited a promising reliability.

Kurt E. Petersen | K. Petersen

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