MODULIGA: The LIGA process as a modular production method-current standardization status in Germany

The LIGA process combines X-ray lithography with electroplating and molding. It is a technique used worldwide for the fabrication of high aspect ratio microstructures. In Germany, this technique will be established as a production line to manufacture micro system devices. A project named (modular production method using the LIGA process) MODULIGA has the goal to link together the activities of the German LIGA centers Forschungszentrum Karlsruhe / Institut für Mikrostrukturtechnik, Karlsruhe (FZK/IMT), Institut für Mikrotechnik, Mainz (IMM) and Berliner Elektronenspeicherring-Gesellschaft für Synchrotronstrahlung, Berlin (BESSY). LIGA process steps will be standardized and interface specifications will be defined to establish a modular production method. Interface specifications are defined for masks, substrate and resist, exposure technology, development and finally electroplating. The standards are defined by testing criteria. The challenges and the current status of standardization will be described.