Electronic and bonding structures of amorphous Si–C–N thin films by x-ray absorption spectroscopy
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K. H. Chen | Y. W. Yang | Yuan-Tsung Chen | W. Pong | M. Tsai | Y. K. Chang | J. Chiou | H. Tsai | C. Wu | J. Wu | J. Jan | L. Lai | Li-Chyong Chen | Y. Chang