论文信息 - Influence of Deposition Temperature, Gas Pressure, Gas Phase Composition, and RF Frequency on Composition and Mechanical Stress of Plasma Silicon Nitride Layers - 字舞流文

Influence of Deposition Temperature, Gas Pressure, Gas Phase Composition, and RF Frequency on Composition and Mechanical Stress of Plasma Silicon Nitride Layers

W. Claassen | W. Valkenburg | M. Willemsen | W. V. D. Wijgert | W. G. J. N. Valkenburg | M. F. C. Willemsen | W. M. v. d. Wijgert