CMOS compatible silicon slot ring resonator sensor

We propose a fully CMOS compatible optical sensor based on the ring resonator mechanism. The waveguide structure of the sensor utilizes the silicon on insulator slot waveguide configuration. The analyte fills the slot and the cladding of the ring resonator. Since the optical power is enhanced and confined within the slot, then the overlap between the analyte and the optical power is maximized. The sensitivity of the sensor was measured to be 350 nm/RIU at the optical wavelength of 1.55 μm.

[1]  Mohamed A. Swillam,et al.  Optical biosensor based on a silicon nanowire ridge waveguide for lab on chip applications , 2015 .

[2]  Mohamed A. Swillam,et al.  Silicon Plasmonics On-Chip Mid-IR Gas Sensor , 2018, IEEE Photonics Technology Letters.

[3]  Raluca Dinu,et al.  Silicon-Organic Hybrid Electro-Optical Devices , 2013, IEEE Journal of Selected Topics in Quantum Electronics.

[4]  J. Dionne,et al.  Plasmon slot waveguides: Towards chip-scale propagation with subwavelength-scale localization , 2006 .

[5]  Mohamed A. Swillam,et al.  Vertically aligned crystalline silicon nanowires with controlled diameters for energy conversion applications: Experimental and theoretical insights , 2014 .

[6]  Ramy H. Gohary,et al.  Efficient Approach for Sensitivity Analysis of Lossy and Leaky Structures Using FDTD , 2009 .

[7]  S. M. Sherif,et al.  Hybrid silicon plasmonic ring resonator modulator , 2016, 2016 Photonics North (PN).

[8]  Mohamed A. Swillam,et al.  Hybrid silicon plasmonic organic directional coupler-based modulator , 2016 .

[9]  Mohamed A. Swillam,et al.  Compact Silicon Electro-Optical Modulator Using Hybrid ITO Tri-Coupled Waveguides , 2018, Journal of Lightwave Technology.

[10]  P. Dumon,et al.  Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology , 2005, Journal of Lightwave Technology.

[11]  Mohamed A. Swillam,et al.  Cheap and efficient plasmonic solar cell , 2014, Photonics West - Optoelectronic Materials and Devices.

[12]  P. Dumon,et al.  Subnanometer Linewidth Uniformity in Silicon Nanophotonic Waveguide Devices Using CMOS Fabrication Technology , 2010, IEEE Journal of Selected Topics in Quantum Electronics.

[13]  Mohamed A. Swillam,et al.  Integrated optical sensor using hybrid plasmonics for lab on chip applications , 2016 .

[14]  Mohamed A. Swillam,et al.  Full Wave Sensitivity Analysis of Guided Wave Structures Using FDTD , 2008 .

[15]  D. Ahn,et al.  Electronic-photonic integrated circuits on the CMOS platform , 2006, SPIE OPTO.

[16]  S S Saini,et al.  Silicon nanowire arrays with enhanced optical properties. , 2012, Optics letters.

[17]  Dimitrios C. Zografopoulos,et al.  Hybrid Plasmonic Modulators and Filters Based on Electromagnetically Induced Transparency , 2016, IEEE Photonics Technology Letters.

[18]  Yung-Chiang Lan,et al.  Plasmonic Waveguide Filters Based on Tunneling and Cavity Effects , 2010 .

[19]  Mohamed A. Swillam,et al.  Nanoelectromechanical systems-based metal-insulator-metal plasmonics tunable filter , 2015 .

[20]  Mohamed A. Swillam,et al.  Metal-less silicon plasmonic mid-infrared gas sensor , 2016 .

[21]  Mohamed A. Swillam,et al.  Integrated plasmonic refractometric sensor using Fano resonance , 2017 .

[22]  Mohamed A. Swillam,et al.  Electro-optic modulators based on hybrid plasmonic micro-ring-disk resonators with femtojoule switching energy , 2016 .

[23]  Mohamed A. Swillam,et al.  Adjoint Sensitivity Analysis of Dielectric Discontinuities Using FDTD , 2007 .

[24]  Mohamed A. Swillam,et al.  Plasmonic silicon solar cells using titanium nitride: a comparative study , 2014 .

[25]  D. Gramotnev,et al.  Plasmonics beyond the diffraction limit , 2010 .

[26]  Mohamed A. Swillam,et al.  Nonlinear tuning techniques of plasmonic nano-filters , 2015 .

[27]  Mohamed A. Swillam,et al.  Electro-Optic Plasmonic Modulator With Direct Coupling to Silicon Waveguides , 2017, IEEE Photonics Journal.

[28]  Mohamed A. Swillam,et al.  Low power hybrid plasmonic microring-on-disks electro-optical modulators , 2017 .

[29]  D. Van Thourhout,et al.  Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology , 2010, IEEE Journal of Selected Topics in Quantum Electronics.

[30]  Mohamed A. Swillam,et al.  Filter Response of Feedback Plasmonic Junctions , 2011 .

[31]  Mohamed A. Swillam,et al.  Semiconductor plasmonic gas sensor using on-chip infrared spectroscopy , 2017 .

[32]  Mohamed A. Swillam,et al.  Plasmonic optical nanotweezers , 2017, OPTO.

[33]  Mohamed A. Swillam,et al.  Hybrid electro-optic plasmonic modulators based on directional coupler switches , 2016 .

[34]  N. Voelcker,et al.  Near-Field Mapping of Localized Plasmon Resonances in Metal-Free, Nanomembrane Graphene for Mid-Infrared Sensing Applications , 2018, ACS Applied Nano Materials.

[35]  Mohamed A. Swillam,et al.  Investigating several ZrN plasmonic nanostructures and their effect on the absorption of organic solar cells , 2017 .

[36]  Mohamed A. Swillam,et al.  High-speed hybrid plasmonic electro-optical absorption modulator exploiting epsilon-near-zero effect in indium-tin-oxide , 2018, Journal of Nanophotonics.

[37]  Mohamed A. Swillam,et al.  Hybrid plasmonic electro-optical modulator , 2016 .