This research aims to improve machining accuracy concerning the method of drilling ceramics and other hard and brittle materials as well as to establish a drilling technology that would ensure high efficiency and longer life of tools. Specifically, the authors contrived a new drilling method that combines ultrasonic vibrations of a diamond core drill and low-frequency vibrations of the workpiece and produced a combined vibration drilling apparatus experimentally. In this paper, the combined vibration drilling apparatus is used for a series of experiments under different vibration conditions to examine the behavior of drilling force, drilled hole accuracy, and edge chipping on the drilled hole surface. In addition, the behavior of tools during combined vibration drilling are theoretically examined. As a result of these considerations, the authors found that combining ultrasonic and low-frequency vibrations is one of the most effective methods for drilling hard and brittle materials.