论文信息 - Production of dense and oriented structures including titanium nitride by energetic condensation from plasmas - 字舞流文

Production of dense and oriented structures including titanium nitride by energetic condensation from plasmas

D. Mckenzie | W. McFall | H. Nguyen | Y. Yin

[1] C. Davis,et al. A simple model for the formation of compressive stress in thin films by ion bombardment , 1993 .

[2] D. Mckenzie,et al. Compressive stress induced formation of cubic boron nitride , 1993 .

[3] C. Ribbing,et al. Optimizing optical properties of reactively sputtered titanium nitride films , 1990 .

[4] A. Perry. The relationship between residual stress, X-ray elastic constants and lattice parameters in TiN films made by physical vapor deposition , 1989 .

[5] R. Boswell,et al. Plasma production using a standing helicon wave , 1970 .