论文信息 - A differential backside laserprobing technique for the investigation of the lateral temperature distribution in power devices

A differential backside laserprobing technique for the investigation of the lateral temperature distribution in power devices

We present a differential backside laser probing technique for the investigation of lateral temperature variations in power devices. The method is applied to analyze the temperature evolution in IGBTs operated under short circuit conditions. The extraction of the temperature from optical modulation signals is supported by electro-thermal device simulations, taking into account sample preparation effects.

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