Characterization of a compact filament-driven multicusp ion source for low energy time-of-flight Rutherford backscattering spectrometry application

Because of the limited pulse height energy resolution of a detector, conventional Rutherford backscattering spectrometry (RBS) requires an energy of the incident α particle to be in the MeV region. At Chiang Mai University we have researched the possibility of utilizing a 280 keV nanosecond pulse of helium ions for RBS applications. We have chosen a compact filament-driven multicusp ion source of 2.6 cm in diameter and 8 cm in length being investigated for the time-of-flight RBS applications. In this article, we present the general ion source performance using helium, nitrogen, and argon for generating the discharge plasma. The general ion source characteristics have been measured and analyzed. The measurements also include the extractable ion current and the ion beam emittance. We have performed beam extraction calculations with a computer simulation code KOBRA. Results of the measurements and calculations will be presented and discussed.

[1]  D. Boonyawan,et al.  Characteristics of a 13.56 MHz radiofrequency-driven multicusp ion source , 2002 .

[2]  Ka-Ngo Leung,et al.  Nanobeam production with the multicusp ion source , 2000 .

[3]  H. Becker,et al.  Production of short ion pulses for TOF-RBS , 1999 .

[4]  S. Freedman,et al.  Development of an rf driven multicusp ion source for nuclear science experiments 1 This work was sup , 1998 .

[5]  M. Williams,et al.  Lifetime enhancement of a multicusp ion source for lithography , 1998 .

[6]  B. Doyle,et al.  Using heavy ion backscattering spectrometry (HIBS) to solve integrated circuit manufacturing problems , 1997 .

[7]  A. Mondelli,et al.  Axial energy spread measurements of an accelerated positive ion beam , 1997 .

[8]  M. Mayer,et al.  SIMNRA user's guide , 1997 .

[9]  D. Pickard,et al.  A compact filament-driven multicusp ion source , 1996 .

[10]  R. Weller,et al.  Analysis of a thin, silicon-oxide, silicon-nitride multilayer target by time-of-flight medium energy backscattering , 1996 .

[11]  I. Baumvol,et al.  Characterisation of ultrathin dielectric films with ion beams , 1995 .

[12]  K. Leung.  Multicusp ion sources (invited) , 1994 .

[13]  P. Spädtke.  Numerical simulation of ion beam related problems (invited) , 1992 .

[14]  M. Döbeli,et al.  Heavy ion backscattering analysis with a time-of-flight detector , 1990 .

[15]  M. Mendenhall,et al.  A time-of-flight spectrometer for medium energy ion scattering , 1989 .

[16]  Leonard C. Feldman,et al.  Fundamentals of Surface and Thin Film Analysis , 1986 .